Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8991332 | Apparatus to control semiconductor film deposition characteristics | Satheesh Kuppurao, David K. Carlson, Manish Hemkar, Andrew Lam, Errol Antonio C. Sanchez | 2015-03-31 |
| 8663390 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Herman Diniz, Kailash Kiran Patalay, Brian H. Burrows +4 more | 2014-03-04 |
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Herman Diniz, Kailash Kiran Patalay, Brian H. Burrows +4 more | 2011-07-12 |
| 7718225 | Method to control semiconductor film deposition characteristics | Satheesh Kuppurao, David K. Carlson, Manish Hemkar, Andrew Lam, Errol Antonio C. Sanchez | 2010-05-18 |
| 7709391 | Methods for in-situ generation of reactive etch and growth specie in film formation processes | Satheesh Kuppurao, David K. Carlson, Errol Antonio C. Sanchez | 2010-05-04 |
| 7560352 | Selective deposition | David K. Carlson, Satheesh Kuppurao, Errol Antonio C. Sanchez, Yihwan Kim | 2009-07-14 |