Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986864 | Cleaning apparatus | Yukiyasu Masuda, Zentaro Kawasaki | 2024-05-21 |
| 11929344 | Die bonding for chip conveying apparatus | Zhiwen Chen, Teppei NOMURA | 2024-03-12 |
| 10043609 | Cooling structure for electromagnetic coil, and electromagnetic actuator | Akihiro Ito, Masayuki Kouketsu, Shigeru Morimoto, Koji Tanaka | 2018-08-07 |
| 9304385 | Exposure method and device manufacturing method including selective deformation of a mask | Alton H. Phillips, Douglas C. Watson, Yusaku Uehara | 2016-04-05 |
| 8358401 | Stage apparatus, exposure apparatus and device manufacturing method | Yuichi Shibazaki | 2013-01-22 |
| 8323855 | Pellicle frame apparatus, mask, exposing method, exposure apparatus, and device fabricating method | Tomoki Miyakawa | 2012-12-04 |
| 7081946 | Holding apparatus, holding method, exposure apparatus and device manufacturing method | Tsuneyuki Hagiwara, Hiroto Horikawa, Hideo Mizutani | 2006-07-25 |
| 6727981 | Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method | Taichi Taniuchi, Kyoji Nakamura, Eizo Ohya | 2004-04-27 |