Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948827 | Substrate support mechanism, substrate cleaning device and substrate processing method | Mitsuru Miyazaki, Takuya Inoue | 2024-04-02 |
| 11664252 | Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device | Michiaki MATSUDA, Fuyuki Ogaki, Yusuke Watanabe, Junji Kunisawa | 2023-05-30 |
| 11626299 | Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatus | Yoshitaka Kitagawa, Tomoatsu Ishibashi | 2023-04-11 |
| 11532491 | Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate | Junji Kunisawa | 2022-12-20 |
| 11495475 | Method of cleaning a substrate | Koji Maeda, Hiroshi Shimomoto, Masayoshi Imai, Yoichi Shiokawa | 2022-11-08 |
| 11311918 | Substrate cleaning apparatus and substrate cleaning method | — | 2022-04-26 |
| 11180303 | Storage container of scrubbing member and package of same | Tomoatsu Ishibashi | 2021-11-23 |
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Tomoatsu Ishibashi, Koichi Fukaya, Yasuyuki Motoshima, Yohei Eto +1 more | 2021-08-17 |
| 10991602 | Substrate washing device | Koichi Fukaya, Tomoatsu Ishibashi | 2021-04-27 |
| 10741423 | Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate | Junji Kunisawa | 2020-08-11 |
| 10361101 | Substrate cleaning apparatus and substrate processing apparatus X | Yoshitaka Kitagawa, Junji Kunisawa | 2019-07-23 |
| 10096492 | Substrate cleaning apparatus and polishing apparatus | Koji Maeda, Hiroshi Shimomoto | 2018-10-09 |
| 9472441 | Substrate processing apparatus | Takahiro Ogawa | 2016-10-18 |