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Multi-function module for an electron beam column |
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Electron anti-fogging baffle used as a detector |
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Electron beam column for writing shaped electron beams |
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| 7315029 |
Electrostatic deflection system with low aberrations and vertical beam incidence |
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Electrostatic deflection system with impedance matching for high positioning accuracy |
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Electron beam inspection system and method |
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Electron beam inspection system and method |
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