Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230496 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Matthew R. MacDonald +1 more | 2025-02-18 |
| 11742200 | Composition and methods using same for carbon doped silicon containing films | Xinjian Lei, Anupama Mallikarjunan, Moo-Sung Kim | 2023-08-29 |
| 11725111 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2023-08-15 |
| 11649547 | Deposition of carbon doped silicon oxide | Meiliang Wang, Xinjian Lei, Matthew R. MacDonald | 2023-05-16 |
| 11152206 | Compositions and methods using same for carbon doped silicon containing films | Xinjian Lei, Anupama Mallikarjunan, Moo-Sung Kim | 2021-10-19 |
| 11139162 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Matthew R. MacDonald +1 more | 2021-10-05 |
| 10991571 | High temperature atomic layer deposition of silicon oxide thin films | Meiliang Wang, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill | 2021-04-27 |
| 10985010 | Methods for making silicon and nitrogen containing films | Xinjian Lei, Moo-Sung Kim | 2021-04-20 |
| 10460929 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Matthew R. MacDonald +1 more | 2019-10-29 |
| 10453675 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Matthew R. MacDonald +1 more | 2019-10-22 |
| 10319584 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Eugene Jospeh Karwacki, Jr., Bing Han +1 more | 2019-06-11 |
| 10283350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Bing Han, Mark Leonard O'Neill +2 more | 2019-05-07 |
| 10283348 | High temperature atomic layer deposition of silicon-containing films | Meiliang Wang, Xinjian Lei, Anupama Mallikarjunan, Bing Han | 2019-05-07 |
| 10242864 | High temperature atomic layer deposition of silicon oxide thin films | Meiliang Wang, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2019-03-26 |
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Kirk Scott Cuthill, Anupama Mallikarjunan, Xinjian Lei, Matthew R. MacDonald, Manchao Xiao +2 more | 2018-12-04 |
| 10077364 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Manchao Xiao, Anupama Mallikarjunan +1 more | 2018-09-18 |
| 9997350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Bing Han, Mark Leonard O'Neill +2 more | 2018-06-12 |
| 9978585 | Organoaminodisilane precursors and methods for depositing films comprising same | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Mark Leonard O'Neill | 2018-05-22 |
| 9905415 | Methods for depositing silicon nitride films | Anupama Mallikarjunan, Xinjian Lei, Moo-Sung Kim, Kirk Scott Cuthill, Mark Leonard O'Neill | 2018-02-27 |
| 9627193 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Manchao Xiao, Anupama Mallikarjunan +1 more | 2017-04-18 |
| 9613799 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Bing Han, Mark Leonard O'Neill +2 more | 2017-04-04 |
| 9460912 | High temperature atomic layer deposition of silicon oxide thin films | Meiliang Wang, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2016-10-04 |
| 9447287 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2016-09-20 |
| 9337018 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Bing Han, Mark Leonard O'Neill +2 more | 2016-05-10 |
| 9200167 | Alkoxyaminosilane compounds and applications thereof | Daniel P. Spence, Ronald Martin Pearlstein, Xinjian Lei, Manchao Xiao, Richard Ho +1 more | 2015-12-01 |