Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746320 | Linear reciprocating disposable belt polishing method and apparatus | Wilbur C. Krusell, Erik H. Engdahl, James Bagley | 2004-06-08 |
| 6666756 | Wafer carrier head assembly | — | 2003-12-23 |
| 6659116 | System for wafer carrier in-process clean and rinse | Damon Vincent Williams | 2003-12-09 |
| 6505636 | Apparatus for wafer carrier in-process clean and rinse | — | 2003-01-14 |
| 6500056 | Linear reciprocating disposable belt polishing method and apparatus | Wilbur C. Krusell, Erik H. Engdahl, James Bagley | 2002-12-31 |
| 6486550 | Locking mechanism for detachably securing a wafer carrier to a conveyor | — | 2002-11-26 |
| 6428394 | Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed | Ben Mooring, Wilbur C. Krusell, Erik H. Engdahl | 2002-08-06 |
| 6425812 | Polishing head for chemical mechanical polishing using linear planarization technology | Anil K. Pant, Douglas W. Young, Konstantin Volodarsky, Andrew J. Nagengast | 2002-07-30 |
| 6409051 | Method and apparatus for dispensing a fluid media | — | 2002-06-25 |
| 6328637 | Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization | Michael Labunsky, Tac Huynh, Anthony Meyer, Andrew J. Nagengast | 2001-12-11 |
| 6261959 | Method and apparatus for chemically-mechanically polishing semiconductor wafers | Christopher Pena | 2001-07-17 |
| 6086460 | Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization | Michael Labunsky, Tac Huynh, Anthony Meyer, Andrew J. Nagengast | 2000-07-11 |
| 5536294 | Process for extracting precious metals from volcanic ore | Wayne L. Gill | 1996-07-16 |
| 4306477 | Ticket dispenser | — | 1981-12-22 |