Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8758086 | Friction sensor for polishing system | Manoocher Birang, Nils Johansson, Boguslaw A. Swedek, Dominic J. Benvegnu | 2014-06-24 |
| 8342906 | Friction sensor for polishing system | Manoocher Birang, Nils Johansson, Boguslaw A. Swedek, Dominic J. Benvegnu | 2013-01-01 |
| 7777483 | Method and apparatus for measuring a thickness of a layer of a wafer | Lawrence Chung-Lai Lei, Siqing Lu, Yu-Chia Chang, Cecilia Martner, Quyen Pham +3 more | 2010-08-17 |
| 7513818 | Polishing endpoint detection system and method using friction sensor | Manoocher Birang, Nils Johansson, Boguslaw A. Swedek, Dominic J. Benvegnu | 2009-04-07 |
| 7112961 | Method and apparatus for dynamically measuring the thickness of an object | Lawrence Chung-Lai Lei, Siqing Lu, Yu-Chia Chang, Cecilia Martner, Quyen Pham +3 more | 2006-09-26 |
| 5862239 | Directional capacitor microphone system | Robert A. Kubli, Eric R. Wagner | 1999-01-19 |
| 5756887 | Mechanism for changing a probe balance beam in a scanning probe microscope | Charles E. Bryson, III, Joseph E. Griffith | 1998-05-26 |
| 5744965 | System for continuously monitoring the integrity of an electrical contact connection | Eric R. Wagner | 1998-04-28 |
| 5701133 | Cascaded multiplying current mirror driver for LED's | Eric R. Wagner | 1997-12-23 |
| 5620573 | Reduced stress tungsten deposition | Charles W. Jurgensen, Ratnaji R. Kola, Henry I. Smith, Eric R. Wagner | 1997-04-15 |
| 5517012 | Optical scanner | Robert A. Boie | 1996-05-14 |
| 5480529 | Apparatus for depositing low stress films | Ratnaji R. Kola, Eric R. Wagner | 1996-01-02 |
| 5481104 | Photodetector circuit with actively damped tuned input | Eric R. Wagner | 1996-01-02 |
| 5444777 | Battery feed for telephone line cards | Joseph Henry Condon | 1995-08-22 |
| 5382340 | Process for reduced stress tungsten deposition | Ratnaji R. Kola, Eric R. Wagner | 1995-01-17 |
| 5337353 | Capacitive proximity sensors | Robert A. Boie | 1994-08-09 |
| 5323053 | Semiconductor devices using epitaxial silicides on (111) surfaces etched in (100) silicon substrates | Sergey Luryi | 1994-06-21 |
| 5307693 | Force-sensing system, including a magnetically mounted rocking element | Joseph E. Griffith | 1994-05-03 |
| 5245796 | Slurry polisher using ultrasonic agitation | Eric R. Wagner | 1993-09-21 |
| 5085070 | Capacitive force-balance system for measuring small forces and pressures | Eric R. Wagner | 1992-02-04 |
| 5081421 | In situ monitoring technique and apparatus for chemical/mechanical planarization endpoint detection | Eric R. Wagner | 1992-01-14 |
| 5072179 | High resolution one and two dimensional position indicating apparatus with plural windings having a common connection and separately energized by signals of different phase | Eric R. Wagner | 1991-12-10 |
| 4958115 | Capacitively commutated brushless DC servomotors | — | 1990-09-18 |
| 4893071 | Capacitive incremental position measurement and motion control | — | 1990-01-09 |
| 4829172 | Optical ranging by phase shift measurement with return signal level compensation | — | 1989-05-09 |