Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332575 | Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Atsushi Ueda, Takayuki Yabu | 2025-06-17 |
| 12185449 | EUV light generation apparatus, electronic device manufacturing method, and inspection method | Yutaka Shiraishi | 2024-12-31 |
| 11659646 | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Koji Yamasaki | 2023-05-23 |
| 11395398 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | — | 2022-07-19 |
| 11360391 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Yutaka Shiraishi, Tsukasa HORI | 2022-06-14 |
| 11067907 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Masaki Nakano | 2021-07-20 |
| 10629414 | Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator | Yutaka Shiraishi, Tsukasa HORI, Osamu Wakabayashi | 2020-04-21 |
| 10582600 | Droplet collection device | Kazukiyo Kamikanna | 2020-03-03 |
| 10506697 | Extreme ultraviolet light generation device | Tsukasa HORI, Toshiyuki Hirashita | 2019-12-10 |
| 10251253 | Extreme ultraviolet light generation device | Tsukasa HORI, Toshiyuki Hirashita | 2019-04-02 |
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takahisa FUJIMAKI, Takayuki Yabu, Yuta Takashima, Yutaka Shiraishi | 2019-03-05 |
| 10143074 | Filter and target supply apparatus | Tomohide Ichinose, Yutaka Shiraishi, Tsukasa HORI, Hideo Hoshino | 2018-11-27 |
| 10028366 | Extreme UV light generation device and target recovery apparatus | Tsukasa HORI, Kazukiyo Kamikanna | 2018-07-17 |
| 10009991 | Target supply apparatus and EUV light generating apparatus | Toshihiro Nishisaka, Yoshiaki Kato | 2018-06-26 |
| 9949354 | Extreme UV light generation apparatus and method | Takashi Saito, Osamu Wakabayashi, Takayuki Yabu | 2018-04-17 |
| 9894744 | Extreme ultraviolet light generation apparatus | Yutaka Shiraishi, Tsukasa HORI, Takuya Ishii | 2018-02-13 |
| 9883574 | Target producing apparatus | Takashi Saito, Tsukasa HORI, Osamu Wakabayashi | 2018-01-30 |
| 9854658 | Extreme ultraviolet light generation apparatus | Masaki Nakano, Tsukasa HORI | 2017-12-26 |
| 9699877 | Extreme ultraviolet light generation apparatus including target droplet joining apparatus | Tsukasa HORI, Hiroshi Umeda | 2017-07-04 |
| 7692026 | Pyrrolotriazole compound | Keizo Kimura, Mitsuo Yoshikane | 2010-04-06 |
| 7474382 | Method for determining focus deviation amount in pattern exposure and pattern exposure method | Hirofumi Fukumoto, Naohiko Ujimaru, Ken-ichi Asahi | 2009-01-06 |
| 6898851 | Electronic device manufacturing method | Yasutaka Nishioka, Junjiro Sakai, Shingo Tomohisa, Susumu Matsumoto, Michinari Yamanaka | 2005-05-31 |
| 6184383 | Method of producing acetals | Atsuo Kondoh | 2001-02-06 |
| 5593175 | Leg apparatus for the magnetically levitated vehicle | Kazuhiro Oda, Masayoshi Azakami, Hideyuki Takizawa, Shoji Iwai | 1997-01-14 |
| 5481984 | Leg apparatus for the magnetically levitated vehicle | Kazuhiro Oda, Hideyuki Takizawa, Masamichi Yamada, Shoji Iwai | 1996-01-09 |