Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8227255 | Biosensor and method of assaying object | — | 2012-07-24 |
| 7883840 | Developing method and method for fabricating semiconductor device using the developing method | Hidekazu Kitahara, Kenji Noda, Kenichi Asahi, Naohiko Ujimaru | 2011-02-08 |
| 7838185 | Focus measurement method and method of manufacturing a semiconductor device | Rimiko Ide, Kenji Noda, Kenichi Asahi, Naohiko Ujimaru | 2010-11-23 |
| 7474382 | Method for determining focus deviation amount in pattern exposure and pattern exposure method | Naohiko Ujimaru, Ken-ichi Asahi, Fumio Iwamoto | 2009-01-06 |
| 7425455 | Biosensor, magnetic molecule measurement device | Masayuki Nomura | 2008-09-16 |
| 6420076 | Method and apparatus of inspecting foreign substance on substrate surface | — | 2002-07-16 |