Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7883840 | Developing method and method for fabricating semiconductor device using the developing method | Kenji Noda, Kenichi Asahi, Naohiko Ujimaru, Hirofumi Fukumoto | 2011-02-08 |
| 7426016 | Exposure apparatus and exposure method | Noritoshi Takada, Seiji Tanaka, Kenji Noda | 2008-09-16 |