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Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck |
William P. Reynolds |
2020-06-23 |
| 10324121 |
Charge integration based electrostatic clamp health monitor |
Edward J. Ladny, Nathaniel Robinson, William Davis Lee |
2019-06-18 |
| 9871473 |
System and method for electrostatic clamping of workpieces |
Thang Nguyen |
2018-01-16 |
| 8502161 |
External cathode ion source |
Sami K. Hahto, Richard Goldberg, Thomas N. Horsky |
2013-08-06 |
| 7875125 |
Method for extending equipment uptime in ion implantation |
Kevin S. Cook, Dennis Keith Manning, Richard Goldberg |
2011-01-25 |
| 7838850 |
External cathode ion source |
Sami K. Hahto, Richard Goldberg, Thomas N. Horsky |
2010-11-23 |
| 6608315 |
Mechanism for prevention of neutron radiation in ion implanter beamline |
Kourosh Saadatmand, Michael Graf |
2003-08-19 |
| 6207964 |
Continuously variable aperture for high-energy ion implanter |
Donald E. DeLuca, Gerald L. Dionne, Paul A. Loomis, Hans J. Rutishauser, Donald N. Polner +1 more |
2001-03-27 |
| 6137112 |
Time of flight energy measurement apparatus for an ion beam implanter |
Kevin W. Wenzel, David Swenson, Ernst F. Scherer, William F. DiVergilio, Kourosh Saadatmand |
2000-10-24 |
| 5497006 |
Ion generating source for use in an ion implanter |
Piero Sferlazzo, William E. Reynolds, Richard M. Cloutier, Thomas N. Horsky |
1996-03-05 |
| 5218210 |
Broad beam flux density control |
Victor M. Benveniste, Walter Hrynyk |
1993-06-08 |
| 5023458 |
Ion beam control system |
Victor M. Benveniste |
1991-06-11 |