Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142466 | Automated transfer of edge ring requiring rotational alignment | Roy Scott Powell, Darryl Angelo, Hui Han | 2024-11-12 |
| 10790237 | Fiducial-filtering automatic wafer centering process and associated system | Benjamin W. Mooring | 2020-09-29 |
| 10770339 | Automated replacement of consumable parts using interfacing chambers | Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2020-09-08 |
| 10541168 | Edge ring centering method using ring dynamic alignment data | Ali Sucipto Tan, Haoquan Yan, Marc Estoque, Jon McChesney, Alexander Paterson | 2020-01-21 |
| 10427307 | Automated replacement of consumable parts using end effectors interfacing with plasma processing system | Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2019-10-01 |
| 10304717 | Automated replacement of consumable parts using interfacing chambers | Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2019-05-28 |
| 10190865 | Verifying end effector flatness using electrical continuity | Silvia Rocio Aguilar Amaya, Derek John Witkowicki | 2019-01-29 |
| 10124492 | Automated replacement of consumable parts using end effectors interfacing with plasma processing system | Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2018-11-13 |
| 10062589 | Front opening ring pod | Scott Wong, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo +1 more | 2018-08-28 |
| 10062590 | Front opening ring pod | Scott Wong, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo +1 more | 2018-08-28 |
| 10062599 | Automated replacement of consumable parts using interfacing chambers | Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2018-08-28 |
| 9881820 | Front opening ring pod | Scott Wong, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo +1 more | 2018-01-30 |
| 9496159 | Wafer position correction with a dual, side-by-side wafer transfer robot | Shawn M. Hamilton, Rich Blank, James S. Templeton | 2016-11-15 |
| 9002514 | Wafer position correction with a dual, side-by-side wafer transfer robot | Shawn M. Hamilton, Rich Blank, Sheldon Templeton | 2015-04-07 |
| 8491248 | Loadlock designs and methods for using same | Chris Gage, Shawn M. Hamilton, Sheldon Templeton, Keith Wood | 2013-07-23 |
| 8489237 | High throughput method of in transit wafer position correction in a system using multiple robots | Chris Gage | 2013-07-16 |
| 8099192 | Method and apparatus for teaching a workpiece transfer robot | Heinrich von Bunau, Tarek Radwan, Karen Townsend | 2012-01-17 |
| 8060252 | High throughput method of in transit wafer position correction in system using multiple robots | Chris Gage | 2011-11-15 |
| 8033769 | Loadlock designs and methods for using same | Chris Gage, Shawn M. Hamilton, Sheldon Templeton, Keith Wood | 2011-10-11 |
| 6934606 | Automatic calibration of a wafer-handling robot | Wayne Tang, Mikhail Bojinov, Stephan Minard | 2005-08-23 |
| 6405101 | Wafer centering system and method | William Johanson, Craig L. Stevens, Steve Kleinke | 2002-06-11 |