| 11302511 |
Field curvature correction for multi-beam inspection systems |
Alan D. Brodie, Rainer Knippelmeyer, John Rouse, Grace Hsiu-Ling Chen |
2022-04-12 |
| 11087950 |
Charge control device for a system with multiple electron beams |
Luca Grella |
2021-08-10 |
| 10790114 |
Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages |
Ichiro Honjo, Hedong Yang, Thanh Huy Ha, Jianwei Wang, Huina Xu |
2020-09-29 |
| 10460903 |
Method and system for charge control for imaging floating metal structures on non-conducting substrates |
Arjun Hegde, Luca Grella |
2019-10-29 |
| 10338013 |
Position feedback for multi-beam particle detector |
Alan D. Brodie |
2019-07-02 |
| 9892885 |
System and method for drift compensation on an electron beam based characterization tool |
Frank Laske |
2018-02-13 |
| 9653257 |
Method and system for reducing charging artifacts in scanning electron microscopy images |
Ben Clarke |
2017-05-16 |
| 9232626 |
Wafer grounding using localized plasma source |
— |
2016-01-05 |
| 9171694 |
Asymmetric electrostatic quadrupole deflector for improved field uniformity |
— |
2015-10-27 |
| 9165742 |
Inspection site preparation |
Richard R. Simmons, Douglas K. Masnaghetti, Mark A. McCord, Fred E. Stanke, Scott A. Young |
2015-10-20 |
| 9082580 |
Notched magnetic lens for improved sample access in an SEM |
— |
2015-07-14 |
| 8752437 |
Magnet strength measurement |
— |
2014-06-17 |