| 10222710 |
Method and system for planning metrology measurements |
Matthew Sendelbach, Niv Sarig |
2019-03-05 |
| 8855401 |
Methods and systems involving measuring complex dimensions of silicon devices |
Anastasios A. Katsetos, Eric P. Solecky, Georgios A. Vakas |
2014-10-07 |
| 8467993 |
Measurement tool monitoring using fleet measurement precision and tool matching precision analysis |
Andrew Brendler, Dmitriy Shneyder, Eric P. Solecky |
2013-06-18 |
| 7791723 |
Optical measurement using fixed polarizer |
Matthew Sendelbach, Shahin Zangooie |
2010-09-07 |
| 7760360 |
Monitoring a photolithographic process using a scatterometry target |
Matthew Sendelbach |
2010-07-20 |
| 7716009 |
Metrology tool recipe validator using best known methods |
Ejaj Ahmed, Stephen W. Goodrich, Eric P. Solecky, Georgios A. Vakas, Erwin E. Weissmann +1 more |
2010-05-11 |
| 7688456 |
Assessment and optimization for metrology instrument |
G. William Banke, Jr. |
2010-03-30 |
| 7571070 |
Measurement system fleet optimization |
Eric P. Solecky, George W. Banke, Jr. |
2009-08-04 |
| 7532999 |
Determining root cause of matching problem and/or fleet measurement precision problem for measurement system |
George W. Banke, Jr., Eric P. Solecky |
2009-05-12 |
| 7479633 |
Methodology for critical dimension metrology using stepper focus monitor information |
— |
2009-01-20 |
| 7467063 |
Determining fleet matching problem and root cause issue for measurement system |
George W. Banke, Jr., Eric P. Solecky |
2008-12-16 |
| 7453583 |
Assessment and optimization for metrology instrument including uncertainty of total measurement uncertainty |
G. William Banke, Jr., Matthew Sendelbach |
2008-11-18 |
| 7353128 |
Measurement system optimization |
George W. Banke, Jr., Eric P. Solecky |
2008-04-01 |
| 7352478 |
Assessment and optimization for metrology instrument |
G. William Banke, Jr. |
2008-04-01 |
| 7340374 |
Determining fleet matching problem and root cause issue for measurement system |
George W. Banke, Jr., Eric P. Solecky |
2008-03-04 |
| 7305320 |
Metrology tool recipe validator using best known methods |
Ejaj Ahmed, Stephen W. Goodrich, Eric P. Solecky, Georgios A. Vakas, Erwin E. Weissmann +1 more |
2007-12-04 |
| 7286247 |
Assessment and optimization for metrology instrument including uncertainty of total measurement uncertainty |
G. William Banke, Jr., Matthew Sendelbach |
2007-10-23 |
| 7265850 |
Fortified, compensated and uncompensated process-sensitive scatterometry targets |
Matthew Sendelbach |
2007-09-04 |
| 7094616 |
High resolution cross-sectioning of polysilicon features with a dual beam tool |
Wei Lu, Chester Wasik |
2006-08-22 |
| 6789033 |
Apparatus and method for characterizing features at small dimensions |
Eric P. Solecky |
2004-09-07 |
| 6683305 |
Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beam |
Wei Lu, Chester Wasik |
2004-01-27 |
| 6472662 |
Automated method for determining several critical dimension properties from scanning electron microscope by using several tilted beam or sample scans |
— |
2002-10-29 |
| 6185323 |
Method characterizing a feature using measurement imaging tool |
Eric P. Solecky |
2001-02-06 |
| 6025600 |
Method for astigmatism correction in charged particle beam systems |
Steven R. Rogers, Eric P. Solecky |
2000-02-15 |
| 5969273 |
Method and apparatus for critical dimension and tool resolution determination using edge width |
Mark E. Lagus, Diana Nyyssonen, deceased, by Jeffrey Swing, executor, Eric P. Solecky, Donald C. Wheeler |
1999-10-19 |
