| 8460057 |
Computer-implemented process control in chemical mechanical polishing |
Boguslaw A. Swedek, Sanjay Rajaram, David A. Chan, Manoocher Birang |
2013-06-11 |
| 7927182 |
Polishing system with in-line and in-situ metrology |
Boguslaw A. Swedek, Sanjay Rajaram, David A. Chan, Manoocher Birang |
2011-04-19 |
| 7619229 |
Technique for matching performance of ion implantation devices using an in-situ mask |
Peter Nunan |
2009-11-17 |
| 7585202 |
Computer-implemented method for process control in chemical mechanical polishing |
Boguslaw A. Swedek, Sanjay Rajaram, David A. Chan, Manoocher Birang |
2009-09-08 |
| 7294039 |
Polishing system with in-line and in-situ metrology |
Boguslaw A. Swedek, Sanjay Rajaram, David A. Chan, Manoocher Birang |
2007-11-13 |
| 7101251 |
Polishing system with in-line and in-situ metrology |
Boguslaw A. Swedek, Sanjay Rajaram, David A. Chan, Manoocher Birang |
2006-09-05 |
| 6939198 |
Polishing system with in-line and in-situ metrology |
Boguslaw A. Swedek, Sanjay Rajaram, David A. Chan, Manoocher Birang |
2005-09-06 |
| 6632124 |
Optical monitoring in a two-step chemical mechanical polishing process |
Boguslaw A. Swedek, Rajeev Bajaj, Savitha Nanjangud, Andreas Norbert Wiswesser, Stan Tsai +3 more |
2003-10-14 |
| 6506097 |
Optical monitoring in a two-step chemical mechanical polishing process |
Boguslaw A. Swedek, Rajeev Bajaj, Savitha Nanjangud, Andreas Norbert Wiswesser, Stan Tsai +3 more |
2003-01-14 |
| 6390908 |
Determining when to replace a retaining ring used in substrate polishing operations |
Hung Chih Chen, Steven M. Zuniga, Manoocher Birang, Kean Chew |
2002-05-21 |
| 6352467 |
Integrated electrodeposition and chemical mechanical polishing tool |
Sasson Somekh, Debabrata Ghosh |
2002-03-05 |
| 6110011 |
Integrated electrodeposition and chemical-mechanical polishing tool |
Sasson Somekh, Debabrata Ghosh |
2000-08-29 |
| 6045670 |
Back sputtering shield |
Gregory N. Hamilton |
2000-04-04 |
| 6013159 |
Particle trap in a magnetron sputtering chamber |
Ivo Raaijmakers |
2000-01-11 |
| 6000415 |
Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal |
David Datong Huo, John Jarvis |
1999-12-14 |
