Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728191 | Front surface and back surface orientation detection of transparent substrate | Michelle A. Wong | 2023-08-15 |
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-09-20 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-03-22 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2019-01-29 |
| 8460057 | Computer-implemented process control in chemical mechanical polishing | Boguslaw A. Swedek, Bret W. Adams, David A. Chan, Manoocher Birang | 2013-06-11 |
| 7927182 | Polishing system with in-line and in-situ metrology | Boguslaw A. Swedek, Bret W. Adams, David A. Chan, Manoocher Birang | 2011-04-19 |
| 7585202 | Computer-implemented method for process control in chemical mechanical polishing | Boguslaw A. Swedek, Bret W. Adams, David A. Chan, Manoocher Birang | 2009-09-08 |
| 7294039 | Polishing system with in-line and in-situ metrology | Boguslaw A. Swedek, Bret W. Adams, David A. Chan, Manoocher Birang | 2007-11-13 |
| 7101251 | Polishing system with in-line and in-situ metrology | Boguslaw A. Swedek, Bret W. Adams, David A. Chan, Manoocher Birang | 2006-09-05 |
| 6939198 | Polishing system with in-line and in-situ metrology | Boguslaw A. Swedek, Bret W. Adams, David A. Chan, Manoocher Birang | 2005-09-06 |