Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508610 | Substrate support with edge seal | Chang Ke, Song-Moon Suh, Cheng-Hsiung Tsai, Yuanhong Guo, Lei Zhou +1 more | 2022-11-22 |
| 11031273 | Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes | Ross Marshall, Tomoharu Matsushita, Cheng-Hsiung Tsai | 2021-06-08 |
| 10892180 | Lift pin assembly | Jallepally Ravi, Manjunatha Koppa, Vinod Konda Purathe, Cheng-Hsiung Tsai, Aravind Kamath | 2021-01-12 |
| 10763086 | High conductance process kit | Cheng-Hsiung Tsai | 2020-09-01 |
| 9865437 | High conductance process kit | Cheng-Hsiung Tsai | 2018-01-09 |
| 9147558 | Finned shutter disk for a substrate process chamber | Song-Moon Suh, Cheng-Hsiung Tsai, Robert Dinsmore, Glen T. Mori | 2015-09-29 |