Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072318 | Chamber component cleanliness measurement system | Amir A. Yasseri, Duane Outka, Kennet Baylon, John Daugherty, Girish M. HUNDI +1 more | 2024-08-27 |
| 12064795 | Conditioning chamber component | Amir A. Yasseri, Hong Shih, John Daugherty, Duane Outka, Lin Xu +2 more | 2024-08-20 |
| 10967407 | Conditioning chamber component | Amir A. Yasseri, Hong Shih, John Daugherty, Duane Outka, Lin Xu +2 more | 2021-04-06 |
| 10391526 | Electrostatic chuck cleaning fixture | Cliff LaCroix, Hong Shih, Kennet Baylon | 2019-08-27 |
| 9748078 | Dual phase cleaning chambers and assemblies comprising the same | Cliff La Croix, Hong Shih | 2017-08-29 |
| 9623449 | Dielectric window cleaning apparatuses | Hong Shih, Cliff LaCroix, John Daugherty | 2017-04-18 |
| 9505036 | Portable sonic particle removal tool with a chemically controlled working fluid | Cliff LaCroix, Hong Shih, John Daugherty | 2016-11-29 |
| 9406534 | Wet clean process for cleaning plasma processing chamber components | Kennet Baylon | 2016-08-02 |
| 9396912 | Methods for mixed acid cleaning of showerhead electrodes | Cliff La Croix, Hong Shih, John Daugherty | 2016-07-19 |
| 9390895 | Gas injector particle removal process and apparatus | Cliff LaCroix | 2016-07-12 |
| 9293305 | Mixed acid cleaning assemblies | Cliff La Croix, Hong Shih, John Daugherty | 2016-03-22 |
| 9245719 | Dual phase cleaning chambers and assemblies comprising the same | Cliff La Croix, Hong Shih | 2016-01-26 |
| 9120201 | Platen and adapter assemblies for facilitating silicon electrode polishing | Duane Outka, Catherine Zhou, Hong Shih | 2015-09-01 |
| 9079228 | Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber | Hong Shih, Shashank Deshmukh, David Carman | 2015-07-14 |
| 8945317 | System and method for cleaning gas injectors | Cliff La Croix, Hong Shih, Allan K. Ronne, John Daugherty, Catherine Zhou | 2015-02-03 |
| 8580079 | Electrode carrier assemblies | Cliff La Croix, Duane Outka, Catherine Zhou, Hong Shih | 2013-11-12 |
| 8550880 | Platen and adapter assemblies for facilitating silicon electrode polishing | Duane Outka, Catherine Zhou, Hong Shih | 2013-10-08 |
| 8545639 | Method of cleaning aluminum plasma chamber parts | Hong Shih, John Daugherty, Dean J. Larson, Tuochuan Huang, Jeremy Chang +5 more | 2013-10-01 |
| 8444456 | Electrode securing platens and electrode polishing assemblies incorporating the same | Cliff La Croix, Duane Outka, Catherine Zhou, Hong Shih | 2013-05-21 |
| 8276604 | Peripherally engaging electrode carriers and assemblies incorporating the same | Jason Augustino, Yan Fang, Duane Outka, Hong Shih, Stephen Whitten | 2012-10-02 |
| 8276898 | Electrode transporter and fixture sets incorporating the same | Hong Shih, Duane Outka | 2012-10-02 |
| 8221552 | Cleaning of bonded silicon electrodes | Duane Outka, Jason Augustino, Stephen Whitten, Hong Shih, Yan Fang | 2012-07-17 |
| 8215321 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Hong Shih, Yaobo Yin, Jason Augustino, Catherine Zhou | 2012-07-10 |
| 8171877 | Backside mounted electrode carriers and assemblies incorporating the same | Jason Augustino, Yan Fang, Duane Outka, Hong Shih, Stephen Whitten | 2012-05-08 |
| 8075701 | Processes for reconditioning multi-component electrodes | Yan Fang, Duane Outka, Hong Shih, Stephen Whitten | 2011-12-13 |