Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8252699 | Composite removable hardmask | Josephine Juhwei Liu, Deenesh Padhi, Bok Hoen Kim, William H. McClintock | 2012-08-28 |
| 6660650 | Selective aluminum plug formation and etchback process | Wei-Yung Hsu, Qi-Zhong Hong | 2003-12-09 |
| 6589865 | Low pressure, low temperature, semiconductor gap filling process | Girish Dixit, Robert H. Havemann | 2003-07-08 |
| 6455419 | System and method of forming a tungsten plug | Srikanth Bolnedi | 2002-09-24 |
| 6355558 | Metallization structure, and associated method, to improve crystallographic texture and cavity fill for CVD aluminum/PVD aluminum alloy films | Girish Dixit | 2002-03-12 |
| 6333265 | Low pressure, low temperature, semiconductor gap filling process | Girish Dixit, Robert H. Havemann | 2001-12-25 |
| 6291347 | Method and system for constructing semiconductor devices | Noel Russell | 2001-09-18 |
| 6215186 | System and method of forming a tungstein plug | Srikanth Bolnedi | 2001-04-10 |
| 6069072 | CVD tin barrier layer for reduced electromigration of aluminum plugs | Girish Dixit | 2000-05-30 |
| 5981382 | PVD deposition process for CVD aluminum liner processing | Noel Russell | 1999-11-09 |
| 5926689 | Process for reducing circuit damage during PECVD in single wafer PECVD system | Donna R. Cote, John C. Forster, Virinder Grewal, Dragan Podlesnik | 1999-07-20 |
| 5849367 | Elemental titanium-free liner and fabrication process for inter-metal connections | Girish Dixit | 1998-12-15 |