| 11569231 |
Non-planar transistors with channel regions having varying widths |
Stephen D. Snyder, Leonard P. GULER, Richard E. Schenker, Michael K. Harper, Urusa Alaan +2 more |
2023-01-31 |
| 7648803 |
Diagonal corner-to-corner sub-resolution assist features for photolithography |
Charles H. Wallace, Shannon Daviess |
2010-01-19 |
| 7374865 |
Methods to pattern contacts using chromeless phase shift masks |
Paul A. Nyhus |
2008-05-20 |
| 7179570 |
Chromeless phase shift lithography (CPL) masks having features to pattern large area line/space geometries |
Paul A. Nyhus |
2007-02-20 |
| 7056645 |
Use of chromeless phase shift features to pattern large area line/space geometries |
Paul A. Nyhus |
2006-06-06 |
| 6774037 |
Method integrating polymeric interlayer dielectric in integrated circuits |
Makarem A. Hussein, Ruth A. Brain, Robert Turklot |
2004-08-10 |
| 6649515 |
Photoimageable material patterning techniques useful in fabricating conductive lines in circuit structures |
Peter K. Moon, Makarem A. Hussein, Alan M. Myers, Charles Recchia, Angelo Kandas |
2003-11-18 |
| 6406995 |
Pattern-sensitive deposition for damascene processing |
Makarem A. Hussein, Alan M. Myers, Charles Recchia, Angelo Kandas |
2002-06-18 |
| 6384481 |
Single step electroplating process for interconnect via fill and metal line patterning |
Makarem A. Hussein, Kevin J. Lee |
2002-05-07 |
| 6365529 |
Method for patterning dual damascene interconnects using a sacrificial light absorbing material |
Makarem A. Hussein |
2002-04-02 |
| 6350670 |
Method for making a semiconductor device having a carbon doped oxide insulating layer |
Ebrahim Andideh, Larry Wong |
2002-02-26 |
| 6329118 |
Method for patterning dual damascene interconnects using a sacrificial light absorbing material |
Makarem A. Hussein |
2001-12-11 |
| 6037255 |
Method for making integrated circuit having polymer interlayer dielectric |
Makarem A. Hussein, Rick Davis |
2000-03-14 |
| 6020266 |
Single step electroplating process for interconnect via fill and metal line patterning |
Makarem A. Hussein, Kevin J. Lee |
2000-02-01 |