Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452923 | Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt | 2016-09-27 |
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Boris Binder, Steffen Bieselt | 2016-07-05 |
| 9376314 | Method for manufacturing a micromechanical system | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Boris Binder | 2016-06-28 |
| 9330929 | Systems and methods for horizontal integration of acceleration sensor structures | Thoralf Kautzsch, Heiko Fröhlich, Mirko Vogt, Andre Röth, Steffen Bieselt | 2016-05-03 |
| 9209778 | Microelectromechanical resonators | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Thomas Santa, Markus Burian | 2015-12-08 |
| 9136136 | Method and structure for creating cavities with extreme aspect ratios | Thoralf Kautzsch, Heiko Fröhlich, Mirko Vogt | 2015-09-15 |
| 8962469 | Methods of stripping resist after metal deposition | — | 2015-02-24 |
| 7396749 | Method for contacting parts of a component integrated into a semiconductor substrate | Ludwig Dittmar, Wolfgang Gustin | 2008-07-08 |
| 7368390 | Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process | Guenther Czech, Carsten Fuelber, Markus Kirchhoff, Mirko Vogt, Stephan Wege | 2008-05-06 |
| 7141507 | Method for production of a semiconductor structure | Oliver Genz, Markus Kirchhoff, Stephan Machill, Alexander Reb, Barbara Schmidt +2 more | 2006-11-28 |