Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7439500 | Analyzing system and charged particle beam device | Stefan Lanio | 2008-10-21 |
| 7427765 | Electron beam column for writing shaped electron beams | Benyamin Buller, William J. DeVore, Xinrong Jiang, Richard L. Lozes, Henry Pearce-Percy +3 more | 2008-09-23 |
| 7335894 | High current density particle beam system | Stefan Lanio, Gerald Schoenecker, Alan D. Brodie, David A. Crewe | 2008-02-26 |
| 7315029 | Electrostatic deflection system with low aberrations and vertical beam incidence | Dieter Winkler, Henry Pearce-Percy, William J. DeVore | 2008-01-01 |
| 7227155 | Electrostatic deflection system with impedance matching for high positioning accuracy | Benyamin Buller, William J. DeVore, Eugene Mirro, Henry Pearce-Percy, Dieter Winkler | 2007-06-05 |
| 7170068 | Method and system for discharging a sample | Igor Petrov, Oren Zoran | 2007-01-30 |
| 4985681 | Particle beam measuring method for non-contact testing of interconnect networks | Matthias Brunner, Reinhold Schmitt, Burkhard Lischke | 1991-01-15 |
| 4926054 | Objective lens for focusing charged particles in an electron microscope | — | 1990-05-15 |
| 4831266 | Detector objective for particle beam apparatus | Hans-Peter Feuerbaum | 1989-05-16 |
| 4812651 | Spectrometer objective for particle beam measuring instruments | Hans-Peter Feuerbaum | 1989-03-14 |
| 4808821 | Spectrometer objective for electron beam mensuration techniques | Hans-Peter Feuerbaum | 1989-02-28 |
| 4785176 | Electrostatic-magnetic lens for particle beam apparatus | Erich Plies | 1988-11-15 |
| 4713543 | Scanning particle microscope | Hans-Peter Feuerbaum, Rainer Spehr | 1987-12-15 |
| 4677296 | Apparatus and method for measuring lengths in a scanning particle microscope | Burkhard Lischke | 1987-06-30 |
| 4675524 | Scanning particle microscope with diminished boersch effect | Rainer Spehr | 1987-06-23 |
| 4514638 | Electron-optical system with variable-shaped beam for generating and measuring microstructures | Burkhard Lischke, Klaus Anger, Erich Plies | 1985-04-30 |
| 4393308 | High current electron source | Klaus Anger, Burkhard Lischke, Erich Plies, Klaus Tonar | 1983-07-12 |
| 4335309 | Method and device for the rapid deflection of a particle beam | Klaus Anger | 1982-06-15 |
| 4238680 | Method and device for setting and correcting errors of an electron optical condenser of a microprojector | Klaus Anger, Burkhard Lischke | 1980-12-09 |