Issued Patents All Time
Showing 176–186 of 186 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6045299 | Unidirectional gate between interconnecting fluid transport regions | Chris R. Whitaker | 2000-04-04 |
| 5908586 | Method for addressing wavefront aberrations in an optical system | Philip Charles Danby Hobbs | 1999-06-01 |
| 5798525 | X-ray enhanced SEM critical dimension measurement | Peter Benizri-Carl, Wolfgang Egert, Manfred Jung | 1998-08-25 |
| 5794023 | Apparatus utilizing a variably diffractive radiation element | Philip Charles Danby Hobbs | 1998-08-11 |
| 5724144 | Process monitoring and thickness measurement from the back side of a semiconductor body | Karl Paul Muller, Katsuya Okumura | 1998-03-03 |
| 5691540 | Assembly for measuring a trench depth parameter of a workpiece | Scott D. Halle, Philip Charles Danby Hobbs, Tadashi Mitsui, Hemantha K. Wickramasinghe | 1997-11-25 |
| 5667622 | In-situ wafer temperature control apparatus for single wafer tools | Isahiro Hasegawa, Karl Paul Muller, Bernhard L. Poschenriedes, Hans-Joerg Timme | 1997-09-16 |
| 5640242 | Assembly and method for making in process thin film thickness measurments | Martin P. O'Boyle, John Charles Panner, Thomas E. Sandwick, Hemantha K. Wickramasinghe | 1997-06-17 |
| 5638176 | Inexpensive interferometric eye tracking system | Philip Charles Danby Hobbs | 1997-06-10 |
| 5516608 | Method for controlling a line dimension arising in photolithographic processes | Philip Charles Danby Hobbs, Steven J. Holmes, Robert Jackson, Jerry Shaw, John L. Sturtevant | 1996-05-14 |
| 5124927 | Latent-image control of lithography tools | William Hopewell, Robert R. Jackson, Jerry Shaw | 1992-06-23 |