Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5667622 | In-situ wafer temperature control apparatus for single wafer tools | Isahiro Hasegawa, Karl Paul Muller, Hans-Joerg Timme, Theodore G. van Kessel | 1997-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5667622 | In-situ wafer temperature control apparatus for single wafer tools | Isahiro Hasegawa, Karl Paul Muller, Hans-Joerg Timme, Theodore G. van Kessel | 1997-09-16 |