Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6294026 | Distribution plate for a reaction chamber with multiple gas inlets and separate mass flow control loops | Klaus Roithner, Bernhard Poschenrieder | 2001-09-25 |
| 6150231 | Overlay measurement technique using moire patterns | Venkatachalam C. Jaiprakash, Christopher Gould | 2000-11-21 |
| 5838045 | Folded trench and RIE/deposition process for high-value capacitors | Wesley C. Natzle | 1998-11-17 |
| 5776808 | Pad stack with a poly SI etch stop for TEOS mask removal with RIE | Bernhard Poschenrieder, Klaus Roithner | 1998-07-07 |
| 5724144 | Process monitoring and thickness measurement from the back side of a semiconductor body | Katsuya Okumura, Theodore G. van Kessel | 1998-03-03 |
| 5667622 | In-situ wafer temperature control apparatus for single wafer tools | Isahiro Hasegawa, Bernhard L. Poschenriedes, Hans-Joerg Timme, Theodore G. van Kessel | 1997-09-16 |
| 5665622 | Folded trench and rie/deposition process for high-value capacitors | Wesley C. Natzle | 1997-09-09 |
| 5605600 | Etch profile shaping through wafer temperature control | Klaus Roithner, Bernhard Poschenrieder, Toru Watanabe | 1997-02-25 |
| 5592412 | Enhanced deep trench storage node capacitance for DRAM | Richard L. Kleinhenz, Klaus Roithner, Masakatsu Tuschiaki | 1997-01-07 |