Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727989 | Enhanced overlay measurement marks for overlay alignment and exposure tool condition control | Xiaoming Yin, Gerhard Kunkel | 2004-04-27 |
| 6150231 | Overlay measurement technique using moire patterns | Karl Paul Muller, Venkatachalam C. Jaiprakash | 2000-11-21 |