Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5798525 | X-ray enhanced SEM critical dimension measurement | Wolfgang Egert, Manfred Jung, Theodore G. van Kessel | 1998-08-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5798525 | X-ray enhanced SEM critical dimension measurement | Wolfgang Egert, Manfred Jung, Theodore G. van Kessel | 1998-08-25 |