Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975032 | Copper recess process with application to selective capping and electroless plating | Timothy J. Dalton, Kenneth M. Davis, Chao-Kun Hu, Fen F. Jamin, Steffen K. Kaldor +11 more | 2005-12-13 |
| 6964604 | Fiber embedded polishing pad | Kenneth M. Davis, Oscar K. Hsu, Kenneth P. Rodbell, Jean Vangsness | 2005-11-15 |
| 6734096 | Fine-pitch device lithography using a sacrificial hardmask | Timothy J. Dalton, Minakshisundaran Balasubramanian Anand, Michael D. Armacost, Stephen M. Gates, Stephen E. Greco +2 more | 2004-05-11 |
| 6712681 | Polishing pads with polymer filled fibrous web, and methods for fabricating and using same | Kenneth P. Rodbell, Oscar K. Hsu, Jean Vangsness, David S. Gilbride, Scott C. Billings +1 more | 2004-03-30 |
| 6685548 | Grooved polishing pads and methods of use | Kenneth M. Davis, Kenneth P. Rodbell | 2004-02-03 |
| 6656019 | Grooved polishing pads and methods of use | Kenneth M. Davis, Kenneth P. Rodbell | 2003-12-02 |
| 6383066 | Multilayered polishing pad, method for fabricating, and use thereof | Alex Siu Keung Chung, Oscar K. Hsu, Kenneth P. Rodbell, Jean Vangsness | 2002-05-07 |
| 6340325 | Polishing pad grooving method and apparatus | Alex Siu Keung Chung, Kenneth M. Davis, Oscar K. Hsu, Kenneth P. Rodbell | 2002-01-22 |
| 6267659 | Stacked polish pad | Michael F. Lofaro, Woody Smith | 2001-07-31 |