| 9796063 |
Multi-layered chemical-mechanical planarization pad |
Paul Andre Lefevre, Anoop Mathew, Guangwei Wu, Scott Xin Qiao, David Adam Wells +2 more |
2017-10-24 |
| 9375822 |
Polishing pad having micro-grooves on the pad surface |
Marc C. Jin, David Adam Wells, John Erik Aldeborgh |
2016-06-28 |
| 9162341 |
Chemical-mechanical planarization pad including patterned structural domains |
Paul Andre Lefevre, Anoop Mathew, Scott Xin Qiao, Guangwei Wu, David Adam Wells |
2015-10-20 |
| 8900036 |
Polishing pad having micro-grooves on the pad surface |
Marc C. Jin, David Adam Wells, John Erik Aldeborgh |
2014-12-02 |
| 8790165 |
Multi-layered chemical-mechanical planarization pad |
Paul Andre Lefevre, Anoop Mathew, Guangwei Wu, Scott Xin Qiao, David Adam Wells +2 more |
2014-07-29 |
| 8758659 |
Method of grooving a chemical-mechanical planarization pad |
Paul Andre Lefevre, David Adam Wells, John Erik Aldeborgh, Marc C. Jin, Guangwei Wu +1 more |
2014-06-24 |
| 8684794 |
Chemical mechanical planarization pad with void network |
Paul Andre Lefevre, David Adam Wells, Scott Xin Qiao, Anoop Mathew, Guangwei Wu |
2014-04-01 |
| 8546260 |
Fabric containing non-crimped fibers and methods of manufacture |
Paul Andre Lefevre |
2013-10-01 |
| 8491360 |
Three-dimensional network in CMP pad |
Paul Andre Lefevre, David Adam Wells, Marc C. Jin, John Erik Aldeborgh |
2013-07-23 |
| 8435099 |
Chemical-mechanical planarization pad including patterned structural domains |
Paul Andre Lefevre, Anoop Mathew, Scott Xin Qiao, Guangwei Wu, David Adam Wells |
2013-05-07 |
| 8430721 |
Chemical-mechanical planarization pad |
Paul Andre Lefevre, Marc C. Jin, John Erik Aldeborgh, David Adam Wells |
2013-04-30 |
| 8377351 |
Polishing pad with controlled void formation |
Paul Andre Lefevre, David Adam Wells, Marc C. Jin, John Erik Aldeborgh, Scott Xin Qiao +2 more |
2013-02-19 |
| 8172648 |
Chemical-mechanical planarization pad |
Paul Andre Lefevre, Marc C. Jin, John Erik Aldeborgh, David Adam Wells |
2012-05-08 |
| 8137166 |
Polishing pad having micro-grooves on the pad surface |
Marc C. Jin, David Adam Wells, John Erik Aldeborgh |
2012-03-20 |
| 7985121 |
Chemical-mechanical planarization pad having end point detection window |
Paul Andre Lefevre, David Adam Wells, John Erik Aldeborgh, Marc C. Jin |
2011-07-26 |
| 7534163 |
Polishing pad |
Jean Vangsness, Alaka Potnis |
2009-05-19 |
| 7357704 |
Polishing pad |
Jean Vangsness, Alaka Potnis |
2008-04-15 |
| 7186166 |
Fiber embedded polishing pad |
Shyng-Tsong Chen, Kenneth M. Davis, Kenneth P. Rodbell, Jean Vangsness |
2007-03-06 |
| 7086932 |
Polishing pad |
Jean Vangsness, Alaka Potnis |
2006-08-08 |
| 6964604 |
Fiber embedded polishing pad |
Shyng-Tsong Chen, Kenneth M. Davis, Kenneth P. Rodbell, Jean Vangsness |
2005-11-15 |
| 6890244 |
Polishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particles |
Jean Vangsness, Scott C. Billings, David S. Gilbride |
2005-05-10 |
| 6712681 |
Polishing pads with polymer filled fibrous web, and methods for fabricating and using same |
Shyng-Tsong Chen, Kenneth P. Rodbell, Jean Vangsness, David S. Gilbride, Scott C. Billings +1 more |
2004-03-30 |
| 6656018 |
Polishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particles |
Jean Vangsness, Scott C. Billings, David S. Gilbride |
2003-12-02 |
| 6383066 |
Multilayered polishing pad, method for fabricating, and use thereof |
Shyng-Tsong Chen, Alex Siu Keung Chung, Kenneth P. Rodbell, Jean Vangsness |
2002-05-07 |
| 6340325 |
Polishing pad grooving method and apparatus |
Shyng-Tsong Chen, Alex Siu Keung Chung, Kenneth M. Davis, Kenneth P. Rodbell |
2002-01-22 |
