Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4591540 | Method of transferring a pattern into a radiation-sensitive layer | Harald Bohlen, Erwin Bretscher, Helmut Engelke, Peter Vettiger, Johann Greschner | 1986-05-27 |
| 4578587 | Error-corrected corpuscular beam lithography | Uwe Behringer, Harald Bohlen, Werner Zapka | 1986-03-25 |
| 4554458 | Electron beam projection lithography | Uwe Behringer, Harald Bohlen, Werner Kulcke | 1985-11-19 |
| 4513203 | Mask and system for mutually aligning objects in ray exposure systems | Harald Bohlen, Helmut Engelke, Johann Greschner, Reinhold Muhl, Hans-Joachim Trumpp | 1985-04-23 |
| 4504558 | Method of compensating the proximity effect in electron beam projection systems | Harald Bohlen, Helmut Engelke, Johann Greschner | 1985-03-12 |
| 4448865 | Shadow projection mask for ion implantation and ion beam lithography | Harald Bohlen, Johann Greschner | 1984-05-15 |
| 4426584 | Method of compensating the proximity effect in electron beam projection systems | Harald Bohlen, Helmut Engelke, Johann Greschner | 1984-01-17 |
| 4417946 | Method of making mask for structuring surface areas | Harald Bohlen, Helmut Engelke, Johann Greschner | 1983-11-29 |
| 4370554 | Alignment system for particle beam lithography | Harald Bohlen, Johann Greschner, Werner Kulcke | 1983-01-25 |
| 4342817 | Mask for structuring surface areas, and method of making it | Harald Bohlen, Helmut Engelke, Johann Greschner | 1982-08-03 |
| 4334156 | Method of shadow printing exposure | Harald Bohlen, Helmut Engelke, Werner Kulcke, Johann Greschner | 1982-06-08 |
| 4267259 | Exposure process | Harald Bohlen, Johann Greschner, Werner Kulcke | 1981-05-12 |