| 4591540 |
Method of transferring a pattern into a radiation-sensitive layer |
Harald Bohlen, Erwin Bretscher, Helmut Engelke, Peter Vettiger, Johann Greschner |
1986-05-27 |
| 4578587 |
Error-corrected corpuscular beam lithography |
Uwe Behringer, Harald Bohlen, Werner Zapka |
1986-03-25 |
| 4554458 |
Electron beam projection lithography |
Uwe Behringer, Harald Bohlen, Werner Kulcke |
1985-11-19 |
| 4513203 |
Mask and system for mutually aligning objects in ray exposure systems |
Harald Bohlen, Helmut Engelke, Johann Greschner, Reinhold Muhl, Hans-Joachim Trumpp |
1985-04-23 |
| 4504558 |
Method of compensating the proximity effect in electron beam projection systems |
Harald Bohlen, Helmut Engelke, Johann Greschner |
1985-03-12 |
| 4448865 |
Shadow projection mask for ion implantation and ion beam lithography |
Harald Bohlen, Johann Greschner |
1984-05-15 |
| 4426584 |
Method of compensating the proximity effect in electron beam projection systems |
Harald Bohlen, Helmut Engelke, Johann Greschner |
1984-01-17 |
| 4417946 |
Method of making mask for structuring surface areas |
Harald Bohlen, Helmut Engelke, Johann Greschner |
1983-11-29 |
| 4370554 |
Alignment system for particle beam lithography |
Harald Bohlen, Johann Greschner, Werner Kulcke |
1983-01-25 |
| 4342817 |
Mask for structuring surface areas, and method of making it |
Harald Bohlen, Helmut Engelke, Johann Greschner |
1982-08-03 |
| 4334156 |
Method of shadow printing exposure |
Harald Bohlen, Helmut Engelke, Werner Kulcke, Johann Greschner |
1982-06-08 |
| 4267259 |
Exposure process |
Harald Bohlen, Johann Greschner, Werner Kulcke |
1981-05-12 |
