Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4554458 | Electron beam projection lithography | Uwe Behringer, Harald Bohlen, Peter Nehmiz | 1985-11-19 |
| 4522893 | Contact device for releasably connecting electrical components | Harald Bohlen, Gerhard Kaus, Johann Greschner, Joachim Keyser | 1985-06-11 |
| 4520314 | Probe head arrangement for conductor line testing with at least one probe head comprising a plurality of resilient contacts | Karl Asch, Johann Greschner, Michael Kallmeyer | 1985-05-28 |
| 4370554 | Alignment system for particle beam lithography | Harald Bohlen, Johann Greschner, Peter Nehmiz | 1983-01-25 |
| 4334156 | Method of shadow printing exposure | Harald Bohlen, Helmut Engelke, Peter Nehmiz, Johann Greschner | 1982-06-08 |
| 4267259 | Exposure process | Harald Bohlen, Johann Greschner, Peter Nehmiz | 1981-05-12 |