| 5166888 |
Fabrication of particle beam masks |
— |
1992-11-24 |
| 4591540 |
Method of transferring a pattern into a radiation-sensitive layer |
Harald Bohlen, Erwin Bretscher, Peter Nehmiz, Peter Vettiger, Johann Greschner |
1986-05-27 |
| 4513203 |
Mask and system for mutually aligning objects in ray exposure systems |
Harald Bohlen, Johann Greschner, Reinhold Muhl, Peter Nehmiz, Hans-Joachim Trumpp |
1985-04-23 |
| 4504558 |
Method of compensating the proximity effect in electron beam projection systems |
Harald Bohlen, Johann Greschner, Peter Nehmiz |
1985-03-12 |
| 4426584 |
Method of compensating the proximity effect in electron beam projection systems |
Harald Bohlen, Johann Greschner, Peter Nehmiz |
1984-01-17 |
| 4417946 |
Method of making mask for structuring surface areas |
Harald Bohlen, Johann Greschner, Peter Nehmiz |
1983-11-29 |
| 4342817 |
Mask for structuring surface areas, and method of making it |
Harald Bohlen, Johann Greschner, Peter Nehmiz |
1982-08-03 |
| 4334156 |
Method of shadow printing exposure |
Harald Bohlen, Werner Kulcke, Peter Nehmiz, Johann Greschner |
1982-06-08 |
