Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5055383 | Process for making masks with structures in the submicron range | Otto Koblinger, Klaus Meissner, Hans-Joachim Trumpp, Werner Zapka | 1991-10-08 |
| 4980317 | Method of producing integrated semiconductor structures comprising field-effect transistors with channel lengths in the submicron range using a three-layer resist system | Otto Koblinger, Hans-Joachim Trumpp | 1990-12-25 |
| 4816115 | Process of making via holes in a double-layer insulation | Eva Horner, Hans-Joachim Trumpp | 1989-03-28 |
| 4513203 | Mask and system for mutually aligning objects in ray exposure systems | Harald Bohlen, Helmut Engelke, Johann Greschner, Peter Nehmiz, Hans-Joachim Trumpp | 1985-04-23 |
| 4489146 | Reverse process for making chromium masks using silicon dioxide dry etch mask | Gunther Bock, Bernhard Hafner, Klaus P. Thiel | 1984-12-18 |