| 6796630 |
Droplet deposition apparatus |
Robert M. Ison, Jerzy Zaba |
2004-09-28 |
| 5326426 |
Undercut membrane mask for high energy photon patterning |
Andrew Ching Tam, Gerhard E. Wolbold |
1994-07-05 |
| 5055383 |
Process for making masks with structures in the submicron range |
Otto Koblinger, Klaus Meissner, Reinhold Muhl, Hans-Joachim Trumpp |
1991-10-08 |
| 4980536 |
Removal of particles from solid-state surfaces by laser bombardment |
Karl Asch, Joachim Keyser, Klaus Meissner |
1990-12-25 |
| 4855197 |
Mask for ion, electron or X-ray lithography and method of making it |
Jurgen Kempf, Joachim Keyser, Karl Asch |
1989-08-08 |
| 4724392 |
System for testing magnetic head/disk interfaces |
Upali Bandara, Gerhard Elsner, Volker Heinrich, Holger Hinkel, Artur Lang +2 more |
1988-02-09 |
| 4578587 |
Error-corrected corpuscular beam lithography |
Uwe Behringer, Harald Bohlen, Peter Nehmiz |
1986-03-25 |