Patents per Year
Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 4751169 | Method for repairing lithographic transmission masks | Kurt Datwyler, Peter Vettinger | 1988-06-14 | $21,501,000 |
| 4589952 | Method of making trenches with substantially vertical sidewalls in silicon through reactive ion etching | Johann Greschner, Hans-Joachim Trumpp | 1986-05-20 | $24,584,000 |
| 4578587 | Error-corrected corpuscular beam lithography | Harald Bohlen, Peter Nehmiz, Werner Zapka | 1986-03-25 | $14,275,000 |
| 4554458 | Electron beam projection lithography | Harald Bohlen, Werner Kulcke, Peter Nehmiz | 1985-11-19 | $13,371,000 |