Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4751169 | Method for repairing lithographic transmission masks | Kurt Datwyler, Peter Vettinger | 1988-06-14 |
| 4589952 | Method of making trenches with substantially vertical sidewalls in silicon through reactive ion etching | Johann Greschner, Hans-Joachim Trumpp | 1986-05-20 |
| 4578587 | Error-corrected corpuscular beam lithography | Harald Bohlen, Peter Nehmiz, Werner Zapka | 1986-03-25 |
| 4554458 | Electron beam projection lithography | Harald Bohlen, Werner Kulcke, Peter Nehmiz | 1985-11-19 |