Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electron beam projection lithography

Electron beam projection lithography

US Patent 4554458 · Granted Nov 19, 1985

Estimated economic value: $13,371,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for repairing lithographic transmission masks1988
Method of transferring a pattern into a radiation-sensitive layer1986
Method of transferring a pattern into a radiation-sensitive layer1986
Method of making trenches with substantially vertical sidewalls in silicon throu1986
Error-corrected corpuscular beam lithography1986
Error-corrected corpuscular beam lithography1986
Error-corrected corpuscular beam lithography1986
Contact device for releasably connecting electrical components1985
Contact device for releasably connecting electrical components1985
Probe head arrangement for conductor line testing with at least one probe head c1985
Mask and system for mutually aligning objects in ray exposure systems1985
Mask and system for mutually aligning objects in ray exposure systems1985