Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4591540 | Method of transferring a pattern into a radiation-sensitive layer | Harald Bohlen, Helmut Engelke, Peter Nehmiz, Peter Vettiger, Johann Greschner | 1986-05-27 |
| 4500790 | System for improving the uniformness of patterns generated by electron beam lithography | Peter Vettiger | 1985-02-19 |