Issued Patents All Time
Showing 201–213 of 213 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5899706 | Method of reducing loading variation during etch processing | Andreas Kluwe, Frank Prein, Thomas Zell | 1999-05-04 |
| 5883813 | Automatic generation of phase shift masks using net coloring | Young Ouk Kim, Mark A. Lavin, Glenwood S. Weinert | 1999-03-16 |
| 5877964 | Semiconductor device compensation system and method | Robert T. Sayah | 1999-03-02 |
| 5807649 | Lithographic patterning method and mask set therefor with light field trim mask | David S. O'Grady, Richard A. Ferguson, William J. Adair | 1998-09-15 |
| 5795685 | Simple repair method for phase shifting masks | Burn Jeng Lin, Mark Neisser | 1998-08-18 |
| 5740068 | Fidelity enhancement of lithographic and reactive-ion-etched images by optical proximity correction | Robert T. Sayah, John E. Barth, Jr. | 1998-04-14 |
| 5671152 | Efficient generation of negative fill shapes for chips and packages | Mark A. Lavin | 1997-09-23 |
| 5657235 | Continuous scale optical proximity correction by mask maker dose modulation | Ronald M. Martino, J. Weed | 1997-08-12 |
| 5636131 | "Geometric autogeneration of""hard""phase-shift designs for VLSI" | Mark A. Lavin, Pia Naoko Sanda | 1997-06-03 |
| 5553273 | Vertex minimization in a smart optical proximity correction system | — | 1996-09-03 |
| 5553274 | Vertex minimization in a smart optical proximity correction system | — | 1996-09-03 |
| 5538833 | High resolution phase edge lithography without the need for a trim mask | Richard A. Ferguson, Ronald M. Martino, Thomas H. Newman | 1996-07-23 |
| 5537648 | "Geometric autogeneration of ""hard"" phase-shift designs for VLSI" | Mark A. Lavin, Pia Naoko Sanda | 1996-07-16 |