Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7177020 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Yukio Kembo, Hidetoshi Nishiyama +1 more | 2007-02-13 |
| 6894773 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Yukio Kembo, Hidetoshi Nishiyama +1 more | 2005-05-17 |
| 6757621 | Process management system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa +12 more | 2004-06-29 |
| 6650409 | Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system | Minori Noguchi, Yukio Kembo, Hiroshi Morioka, Hidetoshi Nishiyama, Hideaki Doi +6 more | 2003-11-18 |
| 6542830 | Process control system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa +12 more | 2003-04-01 |
| 5463459 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Yukio Kembo, Hidetoshi Nishiyama +1 more | 1995-10-31 |