Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5804033 | Microwave plasma processing method and apparatus | Saburo Kanai, Yoshinao Kawasaki, Kazuaki Ichihashi, Seiichi Watanabe, Makoto Nawata +1 more | 1998-09-08 |
| 5729027 | Ion implanter | Katsumi Tokiguchi, Takayoshi Seki | 1998-03-17 |
| 5646489 | Plasma generator with mode restricting means | Yutaka Kakehi, Yoshinao Kawasaki, Keizo Suzuki, Kazuo Nojiri, Hiromichi Enami +2 more | 1997-07-08 |
| 5607510 | Vacuum processing apparatus | Akitaka Makino, Naoyuki Tamura | 1997-03-04 |
| 5580420 | Plasma generating method and apparatus and plasma processing method and apparatus | Katsuya Watanabe, Naoyuki Tamura, Kenji Nakata, Hiroyuki Shichida, Seiichi Watanabe +2 more | 1996-12-03 |
| 5433789 | Methods and apparatus for generating plasma, and semiconductor processing methods using mode restricted microwaves | Yutaka Kakehi, Yoshinao Kawasaki, Keizo Suzuki, Kazuo Nojiri, Hiromichi Enami +2 more | 1995-07-18 |
| 5432315 | Plasma process apparatus including ground electrode with protection film | Takashi Fujii, Motohiko Yoshigai, Yoshinao Kawasaki, Masaharu Nishiumi | 1995-07-11 |
| 5391260 | Vacuum processing apparatus | Akitaka Makino, Naoyuki Tamura | 1995-02-21 |
| 5290993 | Microwave plasma processing device | Takashi Fujii, Motohiko Yoshigai, Yoshinao Kawasaki, Masaharu Nishiumi | 1994-03-01 |
| 5118378 | Apparatus for detecting an end point of etching | Tatsuo Moroi, Keiji Tada, Noriaki Yamamoto, Gen Marumoto, Yuzou Ohhirabaru | 1992-06-02 |