Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5981399 | Method and apparatus for fabricating semiconductor devices | Yoshio Kawamura, Tatuharu Yamamoto, Shigeo Moriyama, Yoshifumi Kawamoto, Fumihiko Uchida +2 more | 1999-11-09 |
| 5858863 | Fabrication system and method having inter-apparatus transporter | Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura | 1999-01-12 |
| 5820679 | Fabrication system and method having inter-apparatus transporter | Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura | 1998-10-13 |
| 5601686 | Wafer transport method | Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Eiichi Murakami +2 more | 1997-02-11 |
| 5562800 | Wafer transport method | Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Eiichi Murakami +2 more | 1996-10-08 |
| 5270232 | Process for fabricating field effect transistor | Shinichiro Kimura, Shoji Shukuri, Hiromasa Noda, Digh Hisamoto, Hideyuki Matsuoka +4 more | 1993-12-14 |
| 5270259 | Method for fabricating an insulating film from a silicone resin using O.sub . | Shinichi Ito, Yoshio Homma, Eiji Sasaki | 1993-12-14 |
| 5177589 | Refractory metal thin film having a particular step coverage factor and ratio of surface roughness | Nobuyoshi Kobayashi, Hidekazu Goto, Masayuki Suzuki, Yoshio Homma, Yoshitaka Nakamura | 1993-01-05 |
| 5175017 | Method of forming metal or metal silicide film | Nobuyoshi Kobayashi, Hidekazu Goto, Masayuki Suzuki, Yoshio Homma | 1992-12-29 |
| 4897709 | Titanium nitride film in contact hole with large aspect ratio | Yoshio Homma, Kenji Hinode, Kiichiro Mukai | 1990-01-30 |
| 4792842 | Semiconductor device with wiring layer using bias sputtering | Yoshio Honma, Sukeyoshi Tsunekawa, Hiroshi Morisaki | 1988-12-20 |