Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8282849 | Etching process state judgment method and system therefor | Toshihiro Morisawa, Shoji Ikuhara, Daisuke Shiraishi | 2012-10-09 |
| 8083960 | Etching endpoint determination method | Hiroshige Uchida, Daisuke Shiraishi, Shoji Ikuhara | 2011-12-27 |
| 7601240 | Disturbance-free, recipe-controlled plasma processing system and method | Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2009-10-13 |
| 7473332 | Method for processing semiconductor | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Daisuke Shiraishi | 2009-01-06 |
| 7343217 | System for monitoring and controlling a semiconductor manufacturing apparatus using prediction model equation | Junichi Tanaka, Hiroyuki Kitsunai, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2008-03-11 |
| 7330346 | Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus | Shoji Ikuhara, Hideyuki Yamamoto, Daisuke Shiraishi | 2008-02-12 |
| 7166480 | Particle control device and particle control method for vacuum processing apparatus | Daisuke Shiraishi, Hideyuki Yamamoto, Takeshi Arai, Hiroyuki Nakano | 2007-01-23 |
| 7122096 | Method and apparatus for processing semiconductor | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Daisuke Shiraishi | 2006-10-17 |
| 7107115 | Method for controlling semiconductor processing apparatus | Junichi Tanaka, Hideyuki Yamamoto, Shoji Ikuhara | 2006-09-12 |
| 7062347 | Maintenance method and system for plasma processing apparatus | Hideyuki Yamamoto, Toshio Masuda, Shoji Ikuhara, Junichi Tanaka | 2006-06-13 |
| 7058470 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Junichi Tanaka, Hiroyuki Kitsunai, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2006-06-06 |
| 7010374 | Method for controlling semiconductor processing apparatus | Junichi Tanaka, Hideyuki Yamamoto, Shoji Ikuhara | 2006-03-07 |
| 6939435 | Plasma processing apparatus and processing method | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara | 2005-09-06 |
| 6916396 | Etching system and etching method | Motohiko Yoshigai, Hideyuki Yamamoto, Daisuke Shiraishi, Junichi Tanaka, Kenji Tamaki +1 more | 2005-07-12 |
| 6908529 | Plasma processing apparatus and method | Hideyuki Yamamoto, Shoji Ikuhara, Daisuke Shiraishi, Junichi Tanaka | 2005-06-21 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2005-04-19 |
| 6830649 | Apparatus and method for producing semiconductors | Hideyuki Yamamoto, Yoshimi Torii, Tatehito Usui | 2004-12-14 |
| 6828165 | Semiconductor plasma processing apparatus with first and second processing state monitoring units | Junichi Tanaka, Hiroyuki Kitsunai, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-12-07 |
| 6776872 | Data processing apparatus for semiconductor processing apparatus | Junichi Tanaka, Toshio Masuda, Shoji Ikuhara, Hideyuki Yamamoto | 2004-08-17 |
| 6771481 | Plasma processing apparatus for processing semiconductor wafer using plasma | Ryoji Nishio, Seiichiro Kanno, Hideyuki Yamamoto | 2004-08-03 |
| 6745096 | Maintenance method and system for plasma processing apparatus etching and apparatus | Hideyuki Yamamoto, Toshio Masuda, Shoji Ikuhara, Junichi Tanaka | 2004-06-01 |
| 6733618 | Disturbance-free, recipe-controlled plasma processing system and method | Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2004-05-11 |
| 6706543 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor | Junichi Tanaka, Hiroyuki Kitsunai, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-03-16 |
| 6616759 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Junichi Tanaka, Hiroyuki Kitsunai, Daisuke Shiraishi, Hideyuki Yamamato, Shoji Ikuhara +1 more | 2003-09-09 |