Issued Patents All Time
Showing 26–50 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10928813 | Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition | Kaoru Hirata, Yohei Sawada, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda | 2021-02-23 |
| 10895484 | Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method | Yohei Sawada, Nobukazu Ikeda, Kouji Nishino | 2021-01-19 |
| 10884435 | Pressure type flow rate control device, and flow rate calculating method and flow rate control method for same | Kaoru Hirata, Kouji Nishino, Nobukazu Ikeda | 2021-01-05 |
| 10876870 | Method of determining flow rate of a gas in a substrate processing system | Risako Miyoshi, Norihiko Amikura, Kazuyuki Miura, Satoru Yamashita, Yohei Sawada +2 more | 2020-12-29 |
| 10646844 | Vaporization supply apparatus | Atsushi Hidaka, Kaoru Hirata, Katsuyuki Sugita, Takatoshi NAKATANI, Satoru Yamashita +3 more | 2020-05-12 |
| 10648572 | Valve with built-in orifice, and pressure-type flow rate control device | Yohei Sawada, Kaoru Hirata, Kouji Nishino, Nobukazu Ikeda | 2020-05-12 |
| 10604840 | Liquid level indicator and liquid raw material vaporization feeder | Atsushi Hidaka, Kaoru Hirata, Satoru Yamashita, Keiji Hirao, Kouji Nishino +1 more | 2020-03-31 |
| 10408742 | Optical gas concentration measuring method by forming a differential signal using lights with different absorbabilities to a raw material in a gas flow path using a time-sharing method | Kouji Nishino, Nobukazu Ikeda, Michio Yamaji, Shigetoshi Sugawa, Rihito Kuroda | 2019-09-10 |
| 10371630 | Inline concentration meter and concentration detection method | Yoshihiro Deguchi, Nobukazu Ikeda, Michio Yamaji | 2019-08-06 |
| 10324029 | Concentration measurement device | Yoshihiro Deguchi, Michio Yamaji, Nobukazu Ikeda, Kouji Nishino, Masayoshi Kawashima +1 more | 2019-06-18 |
| 10261522 | Pressure-type flow rate control device | Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2019-04-16 |
| 10222323 | Inline concentration measurement device | Yoshihiro Deguchi, Nobukazu Ikeda, Michio Yamaji, Tadayuki Yakushijin | 2019-03-05 |
| 10138844 | Thrust control valve and flying object | Shozo Hidaka, Atsushi Moriwaki, Kensuke Futahashi, Shuhei Hosaka, Kohei KOJIMA +1 more | 2018-11-27 |
| 10073469 | Flow meter and flow control device provided therewith | Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Atsushi Hidaka, Katsuyuki Sugita | 2018-09-11 |
| 9994955 | Raw material vaporization and supply apparatus | Atsushi Hidaka, Satoru Yamashita, Kouji Nishino, Nobukazu Ikeda | 2018-06-12 |
| 9983051 | Fastening structure for brittle-fracturable panel, and method for fastening light transmission window panel comprising brittle-fracturable panel employing same | Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino, Michio Yamaji, Tadayuki Yakushijin | 2018-05-29 |
| 9921089 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2018-03-20 |
| 9841770 | Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device | Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita | 2017-12-12 |
| 9791867 | Flow control device equipped with flow monitor | Atsushi Hidaka, Kouji Nishino, Nobukazu Ikeda | 2017-10-17 |
| 9746856 | Multi-hole orifice plate for flow control, and flow controller using the same | Kaoru Hirata, Atsushi Hidaka, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino +2 more | 2017-08-29 |
| 9733649 | Flow control system with build-down system flow monitoring | Atsushi Hidaka, Kouji Nishino, Nobukazu Ikeda | 2017-08-15 |
| 9651467 | Raw material fluid density detector | Yoshihiro Deguchi, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino, Michio Yamaji +1 more | 2017-05-16 |
| 9638560 | Calibration method and flow rate measurement method for flow rate controller for gas supply device | Nobukazu Ikeda, Yohei Sawada, Tooru Hirai, Kazuyuki Morisaki, Kouji Nishino +1 more | 2017-05-02 |
| 9631777 | Raw material vaporizing and supplying apparatus equipped with raw material concentration | Kaoru Hirata, Atushi Hidaka, Kouji Nishino, Nobukazu Ikeda, Takeshi Nakamura | 2017-04-25 |
| 9574917 | Pressure type flow rate control device | Atsushi Hidaka, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino | 2017-02-21 |