Issued Patents All Time
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9556518 | Raw material gas supply apparatus for semiconductor manufacturing equipment | Atsushi Hidaka, Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2017-01-31 |
| 9383758 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2016-07-05 |
| 9233347 | Mixed gas supply device | Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2016-01-12 |
| 9163743 | Piezoelectrically driven valve and piezoelectrically driven flow rate control device | Atsushi Hidaka, Kaoru Hirata, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino | 2015-10-20 |
| 9163969 | Flow rate measurement device and flow rate measurement method for flow rate controller for gas supply device | Yohei Sawada, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi | 2015-10-20 |
| 9133951 | Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed | Tadahiro Ohmi, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Kaoru Hirata +6 more | 2015-09-15 |
| 9010369 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2015-04-21 |
| 8931506 | Gas supply apparatus equipped with vaporizer | Atsushi Nagata, Atsushi Hidaka, Kaoru Hirata, Atsushi Matsumoto, Kouji Nishino +2 more | 2015-01-13 |
| 8724974 | Vaporizer | Tadahiro Ohmi, Yasuyuki Shirai, Satoru Yamashita, Atsushi Hidaka, Ryousuke Dohi +3 more | 2014-05-13 |
| 8714188 | Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used | Tadahiro Ohmi, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Ryutaro Nishimura | 2014-05-06 |
| 8601976 | Gas supply system for semiconductor manufacturing facilities | Kouji Nishino, Ryousuke Dohi, Kaoru Hirata, Katsuyuki Sugita, Nobukazu Ikeda | 2013-12-10 |
| 8606412 | Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus | Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino, Kaoru Hirata, Katsuyuki Sugita +1 more | 2013-12-10 |
| 8418714 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2013-04-16 |
| 8047225 | Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used | Tadahiro Ohmi, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Ryutaro Nishimura | 2011-11-01 |
| 8047510 | Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith | Kaoru Hirata, Atsushi Hidaka, Atsushi Matsumoto, Ryousuke Dohi, Kouji Nishino +1 more | 2011-11-01 |
| 8020574 | Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method | Tadahiro Ohmi, Nobukazu Ikeda, Kouji Nishino, Kyousuke Dohi, Ryutaro Nishimura | 2011-09-20 |
| 7945414 | Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor | Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino, Kaoru Hirata, Katsuyuki Sugita +1 more | 2011-05-17 |
| 7926509 | Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method | Tadahiro Ohmi, Kazuhiko Sugiyama, Kenetu Mizusawa, Eiji Takahashi, Tomio Uno +3 more | 2011-04-19 |
| 7849869 | Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used | Tadahiro Ohmi, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Ryutaro Nishimura | 2010-12-14 |
| 7798167 | Internal pressure controller of chamber and internal pressure subject-to-control type chamber | Tadahiro Ohmi, Akniobu Teramoto, Tomio Uno, Ryousuke Dohi, Kouji Nishino +3 more | 2010-09-21 |
| 7278437 | Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method | Tadahiro Ohmi, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Ryutaro Nishimura | 2007-10-09 |
| 7219533 | Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method | Tadahiro Ohmi, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura, Tomio Uno +1 more | 2007-05-22 |
| 7080658 | Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method | Tadahiro Ohmi, Nobukazu Ikeda, Kouji Nishino, Kyousuke Dohi, Ryutaro Nishimura | 2006-07-25 |
| 5206954 | Satellite signal receiving apparatus | Nobutaka Inoue, Hiroshi Matsubara | 1993-04-27 |
| 4355319 | System for thermally recording data by partially overlapping successive data segment periods | Tadasu Takeuchi, Hidetsugu Ishikawa | 1982-10-19 |