Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551935 | Pattern forming method and resist composition | Shinji Tarutani, Toru Tsuchihashi, Sou Kamimura, Yuichiro Enomoto, Kana Fujii +3 more | 2017-01-24 |
| 9523913 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Michihiro SHIRAKAWA, Hidenori Takahashi, Shoichi SAITOH, Fumihiro YOSHINO | 2016-12-20 |
| 9513547 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Sou Kamimura, Hidenori Takahashi | 2016-12-06 |
| 9482958 | Method of forming pattern and developer for use in the method | Yuichiro Enomoto, Shinji Tarutani, Sou Kamimura, Kaoru Iwato, Kana Fujii | 2016-11-01 |
| 9417528 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Michihiro SHIRAKAWA, Tadahiro ODANI, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2016-08-16 |
| 9250532 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Michihiro SHIRAKAWA, Tadahiro ODANI, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2016-02-02 |
| 9223219 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film | Yuichiro Enomoto, Shinji Tarutani, Sou Kamimura, Kaoru Iwato, Akinori Shibuya | 2015-12-29 |
| 9128376 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device | Michihiro SHIRAKAWA, Hidenori Takahashi, Sou Kamimura | 2015-09-08 |
| 9097973 | Method of forming pattern and developer for use in the method | Yuichiro Enomoto, Shinji Tarutani, Sou Kamimura, Kaoru Iwato, Kana Fujii | 2015-08-04 |
| 9086623 | Method of forming pattern, actinic-ray- or radiation-sensitive resin composition and actinic-ray- or radiation-sensitive film | Atsushi Nakamura | 2015-07-21 |
| 9086627 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, manufacturing method of electronic device, and electronic device | Michihiro SHIRAKAWA, Tadahiro ODANI, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2015-07-21 |
| 9075310 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Michihiro SHIRAKAWA, Tadahiro ODANI, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2015-07-07 |
| 8999621 | Pattern forming method, chemical amplification resist composition and resist film | Yuichiro Enomoto, Sou Kamimura, Shinji Tarutani, Kaoru Iwato | 2015-04-07 |
| 8987118 | Method of fabricating semiconductor device | Hyung-Rae Lee, Atsushi Nakamura, Yool Kang, Suk Koo HONG, Jae-Ho Kim +2 more | 2015-03-24 |
| 8871642 | Method of forming pattern and developer for use in the method | Yuichiro Enomoto, Shinji Tarutani, Sou Kamimura, Kana Fujii | 2014-10-28 |
| 8859192 | Negative pattern forming method and resist pattern | Kana Fujii, Sou Kamimura, Kaoru Iwato | 2014-10-14 |
| 8808965 | Pattern forming method, pattern, chemical amplification resist composition and resist film | Kaoru Iwato, Shinji Tarutani, Yuichiro Enomoto, Sou Kamimura | 2014-08-19 |
| 8753802 | Pattern forming method, chemical amplification resist composition and resist film | Shinji Tarutani, Sou Kamimura, Yuichiro Enomoto, Kaoru Iwato | 2014-06-17 |
| 8722319 | Pattern forming method, chemical amplification resist composition and resist film | Kaoru Iwato | 2014-05-13 |
| 8663907 | Method of forming pattern | Sou Kamimura, Yuichiro Enomoto, Kaoru Iwato, Shohei Kataoka, Shoichi SAITOH | 2014-03-04 |
| 6577385 | Optical time-domain reflectometer capable of determining when a test of an optical fiber should be conducted | Takashi Sakamoto, Masaki Omori, Kimiaki Iwasaki | 2003-06-10 |