Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7763551 | RLSA CVD deposition control using halogen gas for hydrogen scavenging | Jozef Brcka, Song yun Kang, Toshio Nakanishi, Minoru Honda, Masayuki Kohno | 2010-07-27 |
| 7751177 | Thin-film capacitor with a field modification layer | Douglas R. Roberts, Eric D. Luckowski, Shahid Rauf | 2010-07-06 |
| 7642193 | Method of treating a mask layer prior to performing an etching process | Lee Chen, Akira Koshiishi, Ikuo Sawada | 2010-01-05 |
| 7592248 | Method of forming semiconductor device having nanotube structures | Marius Orlowski | 2009-09-22 |
| 7579282 | Method for removing metal foot during high-k dielectric/metal gate etching | Shahid Rauf, Olubunmi O. Adetutu, Eric D. Luckowski | 2009-08-25 |
| 7572386 | Method of treating a mask layer prior to performing an etching process | Lee Chen, Akira Koshiishi, Ikuo Sawada | 2009-08-11 |
| 7534693 | Thin-film capacitor with a field modification layer and methods for forming the same | Douglas R. Roberts, Eric D. Luckowski, Shahid Rauf | 2009-05-19 |
| 7449414 | Method of treating a mask layer prior to performing an etching process | Lee Chen, Akira Koshiishi, Ikuo Sawada | 2008-11-11 |
| 7371677 | Laterally grown nanotubes and method of formation | Marius Orlowski, Shahid Rauf | 2008-05-13 |
| 7335602 | Charge-free layer by layer etching of dielectrics | Shahid Rauf | 2008-02-26 |
| 7279433 | Deposition and patterning of boron nitride nanotube ILD | Kurt H. Junker, Marius Orlowski | 2007-10-09 |
| 6969568 | Method for etching a quartz layer in a photoresistless semiconductor mask | Shahid Rauf, Wei E. Wu | 2005-11-29 |