| 12380596 |
Method and system for determining beam position |
Jan Stopka, Radovan Vašina, Radim SEJNOHA |
2025-08-05 |
| 12106933 |
Method to correct first order astigmatism and first order distortion in multi-beam scanning electron microscopes |
Jan Stopka |
2024-10-01 |
| 12057287 |
Methods and systems for aligning a multi-beam system |
Jan Stopka, Radovan Va{hacek over (s)}ina, Radim {hacek over (S)}ejnoha |
2024-08-06 |
| 11676795 |
Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets |
Pavel Stejskal, Petr Hlavenka, Libor Novak, Jan Stopka |
2023-06-13 |
| 10937627 |
Multi-beam electron microscope |
Pavel Stejskal, Petr Hlavenka |
2021-03-02 |
| 10790113 |
Multi-beam charged particle imaging apparatus |
Ali Mohammadi-Gheidari, Marek Un{hacek over (c)}ovský |
2020-09-29 |
| 10784076 |
3D defect characterization of crystalline samples in a scanning type electron microscope |
Tomá{hacek over (s)} Vystav{hacek over (e)}l, Anna Prokhodtseva |
2020-09-22 |
| 9741525 |
Charged-particle microscope with astigmatism compensation and energy-selection |
Lubomir Tuma, Alexander Henstra |
2017-08-22 |
| 9362086 |
In-column detector for particle-optical column |
Lubomir Tuma, Petr Hlavenka, Petr Syta{hacek over (r)}, Radek {hacek over (C)}e{hacek over (s)}ka |
2016-06-07 |
| 9053899 |
Method for imaging a sample in a charged particle apparatus |
Lubomír T{dot over (u)}ma, Petr Hlavenka, Petr Syta{hacek over (r)} |
2015-06-09 |