| 7575636 |
Substrate processing apparatus and substrate processing method |
Seiji Katsuoka, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +4 more |
2009-08-18 |
| 7442257 |
Substrate processing apparatus and substrate processing method |
Seiji Katsuoka, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +4 more |
2008-10-28 |
| 7368016 |
Substrate processing unit and substrate processing apparatus |
Seiji Katsuoka, Teruyuki Watanabe, Ryo Kato, Toshio Yokoyama, Kenichi Suzuki +1 more |
2008-05-06 |
| 7341634 |
Apparatus for and method of processing substrate |
Toshio Yokoyama, Akira Ogata, Hiroaki Inoue, Seiji Katsuoka |
2008-03-11 |
| 7087117 |
Substrate processing apparatus and substrate processing method |
Seiji Katsuoka, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +4 more |
2006-08-08 |
| 7063600 |
Polishing apparatus |
Masao Yoshida |
2006-06-20 |
| 6929529 |
Polishing apparatus |
Masao Yoshida |
2005-08-16 |
| 6878044 |
Polishing apparatus |
Kunihiko Sakurai, Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito +2 more |
2005-04-12 |
| 6844274 |
Substrate holder, plating apparatus, and plating method |
Junichiro Yoshioka, Seiji Katsuoka, Yasuhiko Endo, Yugang Guo |
2005-01-18 |
| 6682408 |
Polishing apparatus |
Kunihiko Sakurai, Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito +2 more |
2004-01-27 |
| 6629883 |
Polishing apparatus |
Seiji Katsuoka, Mitsuru Miyazaki, Naoki Noji, Kazuki Chiba, Kenji Fujimoto |
2003-10-07 |
| 6358128 |
Polishing apparatus |
Kunihiko Sakurai, Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito +2 more |
2002-03-19 |
| 6354922 |
Polishing apparatus |
Kunihiko Sakurai, Tetsuji Togawa, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito +2 more |
2002-03-12 |
| 6293855 |
Polishing apparatus |
Masao Yoshida |
2001-09-25 |