Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8537332 | Projection exposure tool for microlithography with a measuring apparatus and method for measuring an irradiation strength distribution | — | 2013-09-17 |
| 8345262 | Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface | Frank Schillke, Matthias Dreher | 2013-01-01 |
| 8228485 | Projection illumination system | Jens Philipps | 2012-07-24 |
| 8104905 | Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface | Frank Schillke, Matthias Dreher | 2012-01-31 |
| 8089634 | Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure | Jochen Hetzler, Frank Schillke, Stefan Schulte, Bernd Doerband | 2012-01-03 |
| 7643149 | Method of aligning an optical system | Ulrich Wagemann | 2010-01-05 |
| 7581305 | Method of manufacturing an optical component | Bernhard Geuppert, Jens Kugler, Thomas Ittner, Bernd Geh, Guenther Seitz +3 more | 2009-09-01 |
| 7508488 | Projection exposure system and method of manufacturing a miniaturized device | Ulrich Wagemann | 2009-03-24 |
| 7403290 | Method and means for determining the shape of a rough surface of an object | — | 2008-07-22 |
| 7382540 | Refractive projection objective | Hans-Juergen Rostalski, Karl-Heinz Schuster, Russell Hudyma, Wilhelm Ulrich | 2008-06-03 |
| 7342667 | Method of processing an optical element using an interferometer having an aspherical lens that transforms a first spherical beam type into a second spherical beam type | Bernd Dörband | 2008-03-11 |
| 7190527 | Refractive projection objective | Hans-Juergen Rostalski, Karl-Heinz Schuster, Russell Hudyma, Wilhelm Ulrich | 2007-03-13 |
| 7154612 | Method for calibrating a radius test bench | — | 2006-12-26 |
| 7133225 | Method of manufacturing an optical system | Bernhard Fellner, Hans-Guenther Sachs, Hartmut Brandenburg, Bernd Doerband, Frank Schillke | 2006-11-07 |
| 7050175 | Method for calibrating an interferometer apparatus, for qualifying an optical surface, and for manufacturing a substrate having an optical surface | Bernd Dörband | 2006-05-23 |
| 6940607 | Method for absolute calibration of an interferometer | Maximilian Mayer, Stephan Reichelt | 2005-09-06 |