Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9280060 | Illumination system for microlithography | Axel Scholz, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2016-03-08 |
| 9217931 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Oliver Natt | 2015-12-22 |
| 9182677 | Optical system of a microlithographic projection exposure apparatus | Ingo Saenger | 2015-11-10 |
| 9046786 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Markus Deguenther, Markus Schwab | 2015-06-02 |
| 8873023 | Illumination system for microlithography | Axel Scholz, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2014-10-28 |
| 8467033 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Oliver Natt | 2013-06-18 |